Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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310 results at Thin Solid Films

Near-field optics: light for the world of nano-scale science
- - D. Pohl
- 1995
- Thin Solid Films
Strain relaxation in ultrathin epitaxial films of β-FeSi₂ on unstrained and strained Si(100) surfaces
- - D.R. Peale
  - R. Haight
  - et al.
- 1995
- Thin Solid Films
Directional and preferential sputtering-based physical vapor deposition
- - S.M. Rossnagel
- 1995
- Thin Solid Films
Copper interconnection integration and reliability
- - C.-K. Hu
  - B. Luther
  - et al.
- 1995
- Thin Solid Films
Porous SiO₂ films analyzed by transmission electron microscopy
- - L. Gignac
  - T.M. Parrill
  - et al.
- 1995
- Thin Solid Films
Surface chemical activation of quartz crystal microbalance gold electrodes - analysis by frequency changes, contact angle measurements and grazing angle FTIR
- - N.J. Geddes
  - E.M. Paschinger
  - et al.
- 1995
- Thin Solid Films
Electromigration failure mechanisms in bamboo-grained Al(Cu) interconnections
- - C.-K. Hu
- 1995
- Thin Solid Films
Kinetic studies of intermetallic compound formation by resistance measurements
- - S.-L. Zhang
  - F.M. d'Heurle
- 1995
- Thin Solid Films
Thermal stability of silicide on polycrystalline Si
- - Q.Z. Hong
  - Stella Q. Hong
  - et al.
- 1994
- Thin Solid Films
A method to confine thin solid organic films between flat rigid walls
- - P. Lambooy
  - J.R. Salem
  - et al.
- 1994
- Thin Solid Films