Cyclic deep reactive ion etching with mask replenishment
- T. Adam
- S. Kim
- et al.
- 2007
- JMM
Publications
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13 results at JMM
SU-8 hollow cantilevers for AFM cell adhesion studies
- Vincent Martinez
- Pascal Behr
- et al.
- 2016
- JMM
'Chip-olate' and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips
- Yuksel Temiz
- Emmanuel Delamarche
- 2014
- JMM
Wafer scale tilt-compensated silicon nanowire atomic force microscopy probes for high aspect ratio geometries
- Brian A. Bryce
- B. Robert Ilic
- et al.
- 2014
- JMM
Curved in-plane electromechanical relay for low power logic applications
- Daniel Grogg
- Ute Drechsler
- et al.
- 2013
- JMM
Patterned cracks improve yield in the release of compliant microdevices from silicon-on-insulator wafers
- G.C. Hill
- J.I. Padovani
- et al.
- 2011
- JMM
Development of vacuum underfill technology for a 3D chip stack
- Katsuyuki Sakuma
- Sayuri Kohara
- et al.
- 2011
- JMM
Multilayered microfluidic probe heads
- Robert D Lovchik
- Ute Drechsler
- et al.
- 2009
- JMM
Low-cost AFM cantilever manufacturing technology
- Roland Guerre
- Ute Drechsler
- et al.
- 2008
- JMM
Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants
- Dong-Weon Lee
- Jung-Ho Kang
- et al.
- 2005
- JMM