Publications

24 results at JVSTB

The Viability of HFO-1234ze(E) (trans-1,3,3,3-Tetrafluoropropene) as a Low Global Warming Potential Silicon Dioxide Etch Gas
- - Aaron Windsor
  - Jeremy Clark
  - et al.
- 2025
- JVSTB
New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition
- - Emilia W. Hirsch
  - Dominik Metzler
  - et al.
- 2024
- JVSTB
Mid-IR and UV-Vis-NIR Mueller matrix ellipsometry characterization of tunable hyperbolic metamaterials based on self-assembled carbon nanotubes
- - Stefan Schöche
  - Po Hsun Ho
  - et al.
- 2020
- JVSTB
Nitride etching with hydrofluorocarbons. II. Evaluation of C₄H₉F for tight pitch Si₃N₄ patterning applications
- - Nathan Marchack
  - Hiroyuki Miyazoe
  - et al.
- 2018
- JVSTB
Nitride etching with hydrofluorocarbons III: Comparison of C₄H₉F and CH₃F for low-k′ nitride spacer etch processes
- - Hiroyuki Miyazoe
  - Nathan Marchack
  - et al.
- 2018
- JVSTB
Extreme-low k porous pSiCOH dielectrics prepared by PECVD
- - H. You
  - Petra Mennell
  - et al.
- 2018
- JVSTB
Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymer
- - Sebastian U. Engelmann
  - Robert L. Bruce
  - et al.
- 2017
- JVSTB
Optimized process for fabrication of free-standing silicon nanophotonic devices
- - Paul Seidler
- 2017
- JVSTB
Study of phosphorus doped Si:C films formed by in situ doped Si epitaxy and implantation process for n-type metal-oxide-semiconductor devices
- - Shogo Mochizuki
  - Rainer Loesing
  - et al.
- 2017
- JVSTB
Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects
- - Deepika Priyadarshini
  - Son Van Nguyen
  - et al.
- 2017
- JVSTB