Allen Gabor

Overview

Allen Gabor

Title

Distinguished Engineer

Location

IBM Research - Yorktown Heights Yorktown Heights, NY USA

Bio

Allen Gabor is a Senior Technical Staff Member at IBM. He has worked in the field of lithography at Arch Chemicals, GlobalFoundries and IBM. This work has included photoresist development, CD control, overlay minimization and 193 dry, immersion and EUV insertion. He received his PhD (1996) in Materials Science and Engineering from Cornell University based on his work on block copolymer photoresists. He is the author of more than 50 journal papers and holder of over 30 patents. He currently serves on the program committee for SPIE Extreme Ultraviolet (EUV) Lithography Conference and is a senior member of SPIE.

Publications

Patents

Top collaborators

NF
Nelson Felix

Nelson Felix

Director, Techinical Business Development - IBM Semiconductors
MB
Mary Breton

Mary Breton

Technical Assistant to Huiming Bu | Semiconductor Enablement Program Management & Infrastructure