Monolithic silicon photonics at 25 Gb/s
Jason S. Orcutt, Douglas M. Gill, et al.
OFC 2016
A competitive 300-mm silicon photonics foundry technology has been developed by GLOBALFOUNDRIES for general availability, which takes advantage of advanced CMOS process technology and provides a manufacturing scale. A state-of-the-art process design kit offers a codesign environment with access to a comprehensive photonics device library along with a monolithically integrated SOI CMOS device library. Advances in automated wafer-level optical test enable statistical photonic device characterization for development, photonic modeling, and manufacturing controls. The key challenges and solutions in developing a manufacturable photonic technology with state-of-the-art performance are described, as well as a roadmap for next generation high-performance monolithic silicon photonics are outlined.
Jason S. Orcutt, Douglas M. Gill, et al.
OFC 2016
N. Feilchenfeld, Karen Nummy, et al.
SPIE Advanced Lithography 2017
Won Suk Lee, Sujith Chandran, et al.
CLEO 2024
Nicolas Breil, Christian Lavoie, et al.
Microelectronic Engineering