APCVD-grown self-aligned SiGe-base HBTs
J.N. Burghartz, T.O. Sedgwick, et al.
BCTM 1993
The appearance of stationary stripes in a voltage contrast SEM image of a circuit, generally known as voltage coding, is a commonly used technique for tracing circuit lines for failure analysis and for locating nodes for waveform measurements. Maintaining a steady striped image requires synchronizing a pattern generator to the SEM raster scan. A circuit is described which can be attached to any SEM to perform this synchronization, and which has a number of features which extend the usefulness of voltage coding. Copyright © 1990 Foundation for Advances in Medicine and Science, Inc.
J.N. Burghartz, T.O. Sedgwick, et al.
BCTM 1993
P. Restle, Keith A. Jenkins, et al.
IEEE Journal of Solid-State Circuits
Keith A. Jenkins, R. Puri, et al.
IEEE International SOI Conference 2001
J.N. Burghartz, J.H. Comfort, et al.
IEDM 1990