Conference paperCharacterization of contact module failure mechanisms for SOI technology using E-beam inspection and in-line TEM
Conference paperAdvanced metallization developments for 32-nm node CMOS technology contact architecture
Conference paperComparative study of CVD TiN vs. ALD TiN for contact metallization in 32nm node and beyond
Conference paperEnhanced cracking resistance of plasma deposited low k SiCOH films with nano imbedded layers