U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
A combinatorial research methodology was presented for investigating material factors in photoresist formulation more rapidly with respect to traditional experimental design. The major advantage of combinatorial methodology is its ability to generate data over a wide range of system variables simultaneously. It is shown that the combinatorial technique generates both temperature and time gradients in polymer films.
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Ming L. Yu
Physical Review B
T. Schneider, E. Stoll
Physical Review B
Imran Nasim, Melanie Weber
SCML 2024