J. Tersoff
Applied Surface Science
A combinatorial research methodology was presented for investigating material factors in photoresist formulation more rapidly with respect to traditional experimental design. The major advantage of combinatorial methodology is its ability to generate data over a wide range of system variables simultaneously. It is shown that the combinatorial technique generates both temperature and time gradients in polymer films.
J. Tersoff
Applied Surface Science
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michiel Sprik
Journal of Physics Condensed Matter