X-ray absorption spectroscopy to probe surface composition and surface deprotection in photoresist films
- Joseph L. Lenhart
- Daniel A. Fischer
- et al.
- 2005
- Langmuir
Publications
10 results for Joseph L. Lenhart
Polymer dynamics and diffusive properties in ultra-thin photoresist films
- Christopher L. Soles
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
X-ray absorption spectroscopy to probe interfacial issues in photolithography
- Joseph L. Lenhart
- Daniel A. Fischer
- et al.
- 2003
- Microlithography 2003
Incoherent neutron scattering and the dynamics of thin film photoresist polymers
- Christopher L. Soles
- Jack F. Douglas
- et al.
- 2003
- Journal of Applied Physics
Probing surface and bulk chemistry in resist films using near edge x-ray absorption fine structure
- Joseph L. Lenhart
- Ronald L. Jones
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Combinatorial methodologies offer potential for rapid research of photoresist materials and formulations
- Joseph L. Lenhart
- Ronald L. Jones
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Chain conformation in ultrathin polymer films
- Ronald L. Jones
- Christopher L. Soles
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Measurement of the spatial evolution of the deprotection reaction front with nanometer resolution using neutron reflectometry
- Eric K. Lin
- Christopher L. Soles
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Confinement effects on the spatial extent of the reaction front in ultrathin chemically amplified photoresists
- Darío L. Goldfarb
- Marie Angelopoulos
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thin film confinement effects on the thermal properties of model photoresist polymers
- Christopher L. Soles
- Eric K. Lin
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures