William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
We measured the ellipsometric angles as a function of photon energy from 0.76 to 6.6 eV of 10 nm thick Ni1 - xPtx alloy (0 < x < 0.25) films deposited on thick thermal oxides. Using basis spline functions and Drude-Lorentz oscillator fitting, we determined the dielectric functions and optical conductivities of our alloy films. We describe techniques to increase the accuracy of our measurements and data analysis. We find absorption peaks near 1.6 and 4.8 eV due to interband optical transitions. There is a significant broadening of these peaks with increasing Pt content. Annealing the metals at 500 °C for 30 s increases the optical conductivity.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
K.N. Tu
Materials Science and Engineering: A