J.W.M. Frenken, R.J. Hamers, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage. © 2005 Springer Science+Business Media. Inc.
J.W.M. Frenken, R.J. Hamers, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Eduardo Almeida Soares, Emilio Ashton Vital Brazil, et al.
Communications Chemistry
J. Choros, G.G. Adams
Journal of Applied Mechanics, Transactions ASME
C.-K. Hu, K.Y. Lee, et al.
Thin Solid Films