Y. Pastol, G. Arjavalingam, et al.
Synthetic Metals
A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage. © 2005 Springer Science+Business Media. Inc.
Y. Pastol, G. Arjavalingam, et al.
Synthetic Metals
G.A. Lucadamo, C. Lavoie, et al.
Materials Research Society Symposium - Proceedings
C. Smart, S.K. Reynolds, et al.
MRS Proceedings 1992
Ijeoma Nnebe, Claudius Feger, et al.
MRS Fall Meeting 2006