Conference paper
Learning Reduced Order Dynamics via Geometric Representations
Imran Nasim, Melanie Weber
SCML 2024
Experimental and theoretical results are presented on the determination of distortion induced during the process of fabrication of X-ray lithography masks. The studies were performed on B-doped Si and on B-N-H mask substrates. © 1985.
Imran Nasim, Melanie Weber
SCML 2024
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
T. Schneider, E. Stoll
Physical Review B