Review

09 Aug 2011

Effects of collector take‐off angle and energy filtering on the BSE image in the SEM

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Abstract

No abstract available.

Paper

Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope

Oliver C. Wells, L. Gignac, et al.

Scanning

Paper

Reduction of edge penetration effect in the scanning electron microscope

Oliver C. Wells

Scanning

Paper

Magnetically filtered low-loss scanning electron microscopy

Oliver C. Wells, Eric Munro

Ultramicroscopy

Paper

Application of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samples

Oliver C. Wells, Maurice McGlashan-Powell, et al.

Scanning

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