A.W. Kleinsasser, T.N. Jackson, et al.
Applied Physics Letters
No abstract available.
A.W. Kleinsasser, T.N. Jackson, et al.
Applied Physics Letters
G.S. Oehrlein, C.M. Ransom, et al.
Applied Physics Letters
M.I. Nathan, T.N. Jackson, et al.
Journal of Electronic Materials
C.M. Ransom, P. Spirito
Symposium on Plasma Processing 1986