Conference paperHigh performance extremely thin SOI (ETSOI) hybrid CMOS with Si channel NFET and strained SiGe channel PFETK. Cheng, A. Khakifirooz, et al.IEDM 2012
Conference paperDesign and technology challenges for sub-0.5 μm CMOS and bipolarT.H. NingVLSI-TSA 1989
Conference paperFabrication of CMOS on ultrathin SOI obtained by epitaxial lateral overgrowth and chemical-mechanical polishingG. Shahidi, B. Davari, et al.IEDM 1990
Conference paper0.25μm low power CMOS devices and circuits from 8 inch SOI materialsB. Chen, A.S. Yapsir, et al.ICSICT 1995