Jim Adkisson, Marwan H. Khater, et al.
ECS Meeting 2012
Conference paper
Improving FinFET Junctions and Contacts via Laser Annealing
Abstract
No abstract available.
Related
Barry P. Linder, A. Dasgupta, et al.
IRPS 2016
Conference paper
Advanced junction formation for Sub-32nm logic devices
Sadanand V. Deshpande, Ahmet Ozcan, et al.
IWJT 2010
X. Yu, Oleg Gluschenkov, et al.
IEDM 2011