Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The integral transform, F( mu , nu )= integral -infinityinfinity D( eta mu , eta + nu ) exp(i mu eta 2)d eta applied to functions D(x, y) on the plane, arises when one applies tomographic reconstruction techniques to problems in radar detection. The authors show that this transform can be inverted to reconstruct the superposition D+D composed with A, where A is a fixed linear transformation of the plane. In the case relevant to applications, where D(x, y) is real valued and vanishes on the half plane x<0, D itself can be reconstructed.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Matthew A Grayson
Journal of Complexity
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997