T.O. Sedgwick
JES
The application of Raman scattering (inelastic light scattering) spectroscopy to the measurement of gas temperature and its gradient in hot flowing gas systems is described, using experiments on a chemical vapor deposition system as an example. Apparatus is described and data are presented showing temperature gradients in the range 280 C to 950 C with RMS deviations of 14°C on a spatial scale of 100μm. Advantages of the system are its ability to make measurements in a small well defined volume and to do this totally without perturbation of the system. The principle disadvantage is a relatively low rate of data acquisition. © 1975.