PaperMethod for examining solid specimens with improved resolution in the scanning electron microscope (SEM)O.C. Wells, A.N. Broers, et al.Applied Physics Letters
PaperImaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscopeL. Gignac, M. Kawasaki, et al.Journal of Applied Physics
PaperScanning reflection image from a solid specimen in the scanning electron microscope with a condenser‐objective lensO.C. WellsScanning
PaperStudies of contamination build up in the SEM using the bse imaging techniqueO.C. Wells, C.F. AliottaScanning