William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
The reaction of copper with silicon in Cu-Si bilayers with overall compositions between copper and the most silicon-rich compound Cu3Si, was monitored by means of several analytical tools, in situ resistance measurements during controlled heating, backscattering, and X-ray diffraction. The order of phase formation was established to be first η″ Cu3Si, followed by the formation of a phase called γ, with about 17 at.% Si. With a sample of intermediate composition, one then observes the reaction of η″ with γ, resulting in the formation of the ε phase with about 20 at.% Si. The resistivity of the various phases was estimated. © 1991.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
T.N. Morgan
Semiconductor Science and Technology
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications