Frank Stem
C R C Critical Reviews in Solid State Sciences
Paper
On the Removal of Insulator Process Induced Radiation Damage from Insulated Gate Field Effect Transistors at Elevated Pressure
Abstract
No abstract available.
Related
Robert W. Keyes
Physical Review B
Lawrence Suchow, Norman R. Stemple
JES
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures