Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Paper
Process integration of self-assembled polymer templates into silicon nanofabrication
Abstract
A set of key processes for nanometer-scale pattern transfer using a self-assembled polymer mask was developed and integrated. As a result, a variety of silicon nanostructures were built.
Related
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications