PaperReciprocity between the reflection electron microscope and the low-loss scanning electron microscopeOliver C. WellsApplied Physics Letters
PaperReduction of penetration effect at sharp edges in the scanning electron microscope (SEM)Oliver C. Wells, Phillip J. BaileyJournal of Microscopy
Conference paperApplications of image diagnostics to metrology quality assurance and process controlJohn A. Allgair, Victor V. Boksha, et al.SPIE Advanced Microelectronic Manufacturing 2003
