Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
The Schottky barrier heights of scandium deposited on n- and p-type silicon have been measured by the capacitance versus voltage technique. Respective values of about 0.4 and 0.7 eV were determined; they do not change upon the formation of the monosilicide, ScSi, after annealing at 500°C. These results are similar to those obtained with yttrium and the rare-earth metals, in agreement with the respective positions of these elements in the Periodic Table: same column, but fourth, fifth and sixth periods, respectively. © 1991.
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007