R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
The importance of vertical continuity of the gate electrodes of submicron CMOS circuits is discussed. A high frequency technique for assessing this continuity is demonstrated. An example of a gate structure with poor vertical continuity is shown, and the effect on circuit operation is presented.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
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