Summary Abstract: High temperature decomposition of SiO2at the Si/SiO2 interface

Paper

01 Jan 1986

Summary Abstract: High temperature decomposition of SiO₂at the Si/SiO₂ interface

No abstract available.

Paper

J.C. Marinace

JES

Paper

Julian J. Hsieh

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Conference paper

J.H. Stathis, R. Bolam, et al.

INFOS 2005

Paper

K.N. Tu

Materials Science and Engineering: A