Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers

J.C. Marinace

JES

Douglass S. Kalika, David W. Giles, et al.

Journal of Rheology

William Hinsberg, Joy Cheng, et al.

SPIE Advanced Lithography 2010

Sang-Min Park, Mark P. Stoykovich, et al.

Advanced Materials