Extremely thin SOI (ETSOI) technology: Past, present, and future
Kangguo Cheng, A. Khakifirooz, et al.
IEEE International SOI Conference 2010
The deposition of amorphous LaAlO 3 thin films by molecular beam deposition (MBD) directly on silicon without detectable oxidation of the underlying substrate was investigated. The suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon was also studied. The films for transmission infrared absorption spectroscopy were grown on one side of double-side polished p-type (001) Si. It was shown that the native SiO 2 on the silicon wafer was thermally desorbed in ultrahigh vacuum at a substrate temperature of 900°C. The Si 2s peak measured by XPS from a 10-Å-thick film of amorphous LaAlO 3/Si.
Kangguo Cheng, A. Khakifirooz, et al.
IEEE International SOI Conference 2010
J. Mannhart, J.G. Bednorz, et al.
Zeitschrift für Physik B Condensed Matter
J. Mannhart, J.G. Bednorz, et al.
Physica B: Physics of Condensed Matter
H. Jagannathan, L.F. Edge, et al.
ECS Meeting 2009