William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Photocurrent spectroscopy and transient photocurrent measurements are employed in order to investigate the change in barrier heights and density of traps within low-k dielectric films under bias stressing conditions. By characterizing these fundamental physical properties, we hope to gain an understanding of the processes leading to time-dependent dielectric breakdown. © 2009 Elsevier B.V. All rights reserved.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
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Thin Solid Films
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Small