Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Photocurrent spectroscopy and transient photocurrent measurements are employed in order to investigate the change in barrier heights and density of traps within low-k dielectric films under bias stressing conditions. By characterizing these fundamental physical properties, we hope to gain an understanding of the processes leading to time-dependent dielectric breakdown. © 2009 Elsevier B.V. All rights reserved.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Frank Stem
C R C Critical Reviews in Solid State Sciences
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron