M.H. Pilkuhn, H. Rupprecht
IEEE T-ED
Paper
TP-A3 Capless Annealing of GaAs Using a Controlled Excess as Vapor Pressure Source
Abstract
No abstract available.
Related
T.J. De Lyon, N.I. Buchan, et al.
Applied Physics Letters
H. Rupprecht, J. Woodall, et al.
Applied Physics Letters
H. Shen, Fred H. Pollak, et al.
Journal of Electronic Materials