Using phthalocyanine precursors to prepare oxide thin films: decoupling the growth rate from the evaporation rate

E. Machler; F. Arrouy; E. Fritsch; J.G. Bednorz; H. Berke; J.R. Huber; J.P. Locquet

doi:10.1063/1.119837

Applied Physics Letters

Paper

04 Aug 1997

Using phthalocyanine precursors to prepare oxide thin films: decoupling the growth rate from the evaporation rate

View publication

Abstract

A new type of precursor, phthalocyanine, for the growth of thin films is proposed. The use of this precursor is illustrated by the growth of CuO and YBa2Cu3O7. Several advantages and implication of this novel deposition process are summarized.

Paper

Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding

M. Despont, H. Gross, et al.

Sensors and Actuators, A: Physical

Paper

Transmission electron microscopy investigations of defects in molecular beam epitaxy-grown oxide films

E.J. Williams, A. Daridon, et al.

Journal of Alloys and Compounds

Paper

Superconducting La_2-xBa_xCuO₄ thin films prepared by chemical beam epitaxy

E. Mächler, J.P. Locquet, et al.

Physica C: Superconductivity and its applications

Paper

Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide

E. Fritsch, E. Mächler, et al.

Chemistry of Materials

View all publications

Abstract

Related

Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding

Transmission electron microscopy investigations of defects in molecular beam epitaxy-grown oxide films

Superconducting La2-xBaxCuO4 thin films prepared by chemical beam epitaxy

Benzoylpivaloylmethanide Precursors for the Chemical Beam Epitaxy of Oxide Thin Films. 1. Synthesis, Characterization, and Use of Yttrium Benzoylpivaloylmethanide

Superconducting La_2-xBa_xCuO₄ thin films prepared by chemical beam epitaxy