M. Despont, H. Gross, et al.
Sensors and Actuators, A: Physical
A new type of precursor, phthalocyanine, for the growth of thin films is proposed. The use of this precursor is illustrated by the growth of CuO and YBa2Cu3O7. Several advantages and implication of this novel deposition process are summarized.
M. Despont, H. Gross, et al.
Sensors and Actuators, A: Physical
E.J. Williams, A. Daridon, et al.
Journal of Alloys and Compounds
J.P. Locquet, Y. Jaccard, et al.
Physical Review B - CMMP
E.J. Williams, A. Daridon, et al.
MRS Fall Meeting 1996