Deep submicron silicon devices: Materials and processing issues
- C.Y. Wong
- Tak II. Ning
- 1990
- Silicon Materials Science and Technology 1990
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34 results for C.Y. Wong
Study of boron penetration through thin oxide with p+-polysilicon gate
- J.Y.-C. Sun
- C.Y. Wong
- et al.
- 1989
- VLSI Technology 1989
Sidewall Oxidation of Polycrystalline-Silicon Gate
- Joseph Piccirillo
- Arup Bhattacharyya
- et al.
- 1989
- IEEE Electron Device Letters
Doping of n+ and p+ polysilicon in a dual-gate CMOS process
- C.Y. Wong
- J.Y.-C. Sun
- et al.
- 1988
- IEDM 1988
Rapid thermal processing of arsenic-implanted polysilicon on very thin oxide
- J.Y.-C. Sun
- R. Angelucci
- et al.
- 1988
- ESSDERC 1988
Chemically induced grain boundary migration in doped polycrystalline silicon films
- K.N. Tu
- J. Tersoff
- et al.
- 1988
- Solid State Communications
Electrical activation of arsenic ion-implanted polycrystalline silicon by rapid thermal annealing
- C.Y. Wong
- Y. Komem
- et al.
- 1987
- Applied Physics Letters
Effects of reactive ion etching on chemical vapor deposition
- C.Y. Wong
- P.E. Batson
- 1987
- Applied Physics Letters
Inducing rapid epitaxy of polycrystalline silicon films deposited on 〈100〉 silicon by arsenic ion implantation
- Y. Komem
- C.Y. Wong
- et al.
- 1987
- Journal of Applied Physics
Lattice imaging of metastable TiSi2
- T.C. Chou
- C.Y. Wong
- et al.
- 1987
- Journal of Applied Physics