Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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19 results for David E. Kotecki

Oxygen-induced inhibition of noble metal silicide formation: implications for electrode/barrier structures used with perovskite materials
- - K.L. Saenger
  - A. Grill
  - et al.
- 1997
- MRS Fall Meeting 1997
Nonlinear dielectric relaxation of Mn doped polycrystalline (Ba,Sr)TiO₃ thin films over the temperature range of 4.2 - 473 K
- - J.D. Baniecki
  - R.B. Laibowitz
  - et al.
- 1998
- MRS Fall Meeting 1998
Sub-micron platinum electrodes by through-mask plating
- - K.L. Saenger
  - G. Costrini
  - et al.
- 2000
- ECS Meeting 2000
Temperature optimization in an azimuthally symmetric single-wafer chemical vapor deposition reactor: The low pressure regime
- - David E. Kotecki
  - Steven G. Barbee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Submicrometer Platinum Electrodes by Through-Mask Plating
- - K.L. Saenger
  - G. Costrini
  - et al.
- 2001
- JES
Optimization of Ta-Si-N thin films for use as oxidation-resistant diffusion barriers
- - C. Cabral
  - K.L. Saenger
  - et al.
- 2000
- Journal of Materials Research
(Ba,Sr)TiO₃ dielectrics for future stacked-capacitor DRAM
- - D.E. Kotecki
  - J.D. Baniecki
  - et al.
- 1999
- IBM J. Res. Dev
Effects of annealing conditions on charge loss mechanisms in MOCVD Ba_0·7Sr_0·3TiO₃ thin film capacitors
- - J.D. Baniecki
  - R.B. Laibowitz
  - et al.
- 1999
- Journal of the European Ceramic Society
Dielectric relaxation of Ba_0.7Sr_0.3TiO₃ thin films from 1 mHz to 20 GHz
- - J.D. Baniecki
  - R.B. Laibowitz
  - et al.
- 1998
- Applied Physics Letters
Compensation doping of Ba_0.7Sr_0.3TiO₃ thin films
- - M. Copel
  - J.D. Baniecki
  - et al.
- 1998
- Applied Physics Letters