Oxygen-induced inhibition of noble metal silicide formation: implications for electrode/barrier structures used with perovskite materials
- K.L. Saenger
- A. Grill
- et al.
- 1997
- MRS Fall Meeting 1997
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19 results for David E. Kotecki
Nonlinear dielectric relaxation of Mn doped polycrystalline (Ba,Sr)TiO3 thin films over the temperature range of 4.2 - 473 K
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1998
- MRS Fall Meeting 1998
Sub-micron platinum electrodes by through-mask plating
- K.L. Saenger
- G. Costrini
- et al.
- 2000
- ECS Meeting 2000
Temperature optimization in an azimuthally symmetric single-wafer chemical vapor deposition reactor: The low pressure regime
- David E. Kotecki
- Steven G. Barbee
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Submicrometer Platinum Electrodes by Through-Mask Plating
- K.L. Saenger
- G. Costrini
- et al.
- 2001
- JES
Optimization of Ta-Si-N thin films for use as oxidation-resistant diffusion barriers
- C. Cabral
- K.L. Saenger
- et al.
- 2000
- Journal of Materials Research
(Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM
- D.E. Kotecki
- J.D. Baniecki
- et al.
- 1999
- IBM J. Res. Dev
Effects of annealing conditions on charge loss mechanisms in MOCVD Ba0·7Sr0·3TiO3 thin film capacitors
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1999
- Journal of the European Ceramic Society
Dielectric relaxation of Ba0.7Sr0.3TiO3 thin films from 1 mHz to 20 GHz
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1998
- Applied Physics Letters
Compensation doping of Ba0.7Sr0.3TiO3 thin films
- M. Copel
- J.D. Baniecki
- et al.
- 1998
- Applied Physics Letters