Sub-micron platinum electrodes by through-mask plating
- K.L. Saenger
- G. Costrini
- et al.
- 2000
- ECS Meeting 2000
Publications
Date
Featured collections
Popular topics
19 results for David E. Kotecki
Submicrometer Platinum Electrodes by Through-Mask Plating
- K.L. Saenger
- G. Costrini
- et al.
- 2001
- JES
Optimization of Ta-Si-N thin films for use as oxidation-resistant diffusion barriers
- C. Cabral
- K.L. Saenger
- et al.
- 2000
- Journal of Materials Research
Effects of annealing conditions on charge loss mechanisms in MOCVD Ba0·7Sr0·3TiO3 thin film capacitors
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1999
- Journal of the European Ceramic Society
(Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM
- D.E. Kotecki
- J.D. Baniecki
- et al.
- 1999
- IBM J. Res. Dev
Compensation doping of Ba0.7Sr0.3TiO3 thin films
- M. Copel
- J.D. Baniecki
- et al.
- 1998
- Applied Physics Letters
Dielectric relaxation of Ba0.7Sr0.3TiO3 thin films from 1 mHz to 20 GHz
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1998
- Applied Physics Letters
Nonlinear dielectric relaxation of Mn doped polycrystalline (Ba,Sr)TiO3 thin films over the temperature range of 4.2 - 473 K
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1998
- MRS Fall Meeting 1998
Buried, self-aligned barrier layer structures for perovskite-based memory devices comprising Pt or Ir bottom electrodes on silicon-contributing substrates
- K.L. Saenger
- A. Grill A
- et al.
- 1998
- Journal of Applied Physics
Oxygen-induced inhibition of noble metal silicide formation: implications for electrode/barrier structures used with perovskite materials
- K.L. Saenger
- A. Grill
- et al.
- 1997
- MRS Fall Meeting 1997