Trimming of hard-masks by gaseous chemical oxide removal (COR) for sub-10nm gates/fins, for gate length control and for embedded logic
- Wesley C. Natzle
- David Horak
- et al.
- 2004
- ASMC 2004
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124 results for Subramanian S. Iyer
1GHz fully pipelined 3.7ns Address access time 8kx1024 embedded DRAM macro
- O. Takahashi
- S. Dhong
- et al.
- 2000
- ISSCC 2000
Growth and strain symmetrization of Si/Ge/C/Sn quaternary alloys by molecular beam epitaxy
- F. Guarin
- Subramanian S. Iyer
- et al.
- 1996
- Applied Physics Letters
Growth and strain symmetrization of Si/Ge/C/Sn quaternary alloys by molecular beam epitaxy
- F. Guarin
- Subramanian S. Iyer
- et al.
- 1995
- Applied Physics Letters
Piezo-optical response of Si1-yCy alloys grown pseudomorphically on Si (001)
- Stefan Zollner
- Craig M. Herzinger
- et al.
- 1995
- Solid State Communications
Relaxation of SiGe thin films grown on Si/SiO2 substrates
- F. Legoues
- A.R. Powell
- et al.
- 1994
- Journal of Applied Physics
New approach to the growth of low dislocation relaxed SiGe material
- A.R. Powell
- Subramanian S. Iyer
- et al.
- 1994
- Applied Physics Letters
Strain symmetrization effects in pseudomorphic Si1-yC y/Si1-xGex superlattices
- K. Eberl
- Subramanian S. Iyer
- et al.
- 1994
- Applied Physics Letters
Novel capacitor-less high density low power vertical memory
- S. Tiwari
- H.I. Hanafi
- et al.
- 1994
- DRC 1994
Silicon-germanium-carbon alloys extending Si based heterostructure engineering
- A.R. Powell
- Subramanian S. Iyer
- 1994
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers