Observation of columnar microstructure in step-graded Si1-xGex/Si films using high-resolution X-ray microdiffraction
- D.E. Eastman
- C.B. Stagarescu
- et al.
- 2002
- Physical Review Letters
Publications
Date
Featured collections
Popular topics
8 results for Z. Cai
Observation of Columnar Microstructure in Step-Graded [Formula presented] Films Using High-Resolution X-Ray Microdiffraction
- D.E. Eastman
- C.B. Stagarescu
- et al.
- 2002
- Physical Review Letters
Observation of x-ray speckle by coherent scattering at grazing incidence
- Z. Cai
- B. Lai
- et al.
- 1994
- Physical Review Letters
Probing strain fields about thin film structures using x-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2003
- MRS Proceedings 2003
Strain effects in thin film/Si substrates revealed by X-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2004
- Powder Diffraction
Nanometer precision metrology of submicron Cu/SiO2 interconnects using fluorescence and transmission x-ray microscopy
- Guangyong Xu
- D.E. Eastman
- et al.
- 2003
- Journal of Applied Physics
Quantitative metrology study of Cu/SiO2 interconnect structures using fluorescence x-ray microscopy
- Guangyong Xu
- X. Su
- et al.
- 2001
- Applied Physics Letters
Experimental study of the surface structure of diblock copolymer films using microscopy and x-ray scattering
- Zhong-Hou Cai
- Kegang Huang
- et al.
- 1993
- The Journal of Chemical Physics