Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

156 results for Willi Volksen

Post porosity plasma protection integration at 48 nm pitch
- - H. Huang
  - Krystelle Lionti
  - et al.
- 2016
- IITC/AMC 2016
Post Porosity Plasma Protection applied to a wide range of ultra low-k materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2012
- IITC 2012
Planar collimated illumination system using nano-hybrid low index materials
- - Yoichi Taira
  - Hidetoshi Numata
  - et al.
- 2011
- FiO 2011
Future of PECVD and spin-on ultra low-k materials
- - Willi Volksen
  - Theo Frot
  - et al.
- 2011
- IITC/MAM 2011
Post Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- - Theo Frot
  - Willi Volksen
  - et al.
- 2011
- IITC/MAM 2011
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- - Willi Volksen
  - Geraud Dubois
  - et al.
- 2007
- VMIC 2007
Analysis of plasma-induced modification of ULK and eULK Materials: Dual damascene processing challenges for 45nm (κ ≤ 2.4) and beyond BEOL technologies
- - N. Fuller
  - M.A. Worsley
  - et al.
- 2006
- IITC 2006
Laser spike annealing: A novel post-porosity treatment for significant toughening of low-k organosilicates
- - Willi Volksen
  - Geraud Dubois
  - et al.
- 2006
- IITC 2006
Laser spike annealing: A novel post-porosity treatment for toughening of low-k organosilicates
- - Willi Volksen
  - Geraud Dubois
  - et al.
- 2006
- VMIC 2006
New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties
- - Dubois Geraud
  - Teddie Magbitang
  - et al.
- 2005
- IITC 2005