Combined influence of pore size distribution and surface hydrophilicity on the water adsorption characteristics of micro- and mesoporous silica
- Sarmenio Saliba
- Patrick W. Ruch
- et al.
- 2016
- Microporous and Mesoporous Materials
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53 results for Teddie P. Magbitang
The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials
- Krystelle Lionti
- M. Darnon
- et al.
- 2015
- Journal of Applied Physics
Toward successful integration of porous low-k materials: Strategies addressing plasma damage
- Krystelle Lionti
- Willi Volksen
- et al.
- 2014
- ECS J. Solid State Sci. Technol.
Hybrid low dielectric constant thin films for microelectronics
- Willi Volksen
- Krystelle Lionti
- et al.
- 2014
- Scripta Materialia
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- Robert Bruce
- Sebastian Engelmann
- et al.
- 2013
- Journal of Physics D: Applied Physics
Post porosity plasma protection: Scaling of efficiency with porosity
- Theo Frot
- Willi Volksen
- et al.
- 2012
- Advanced Functional Materials
Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- Willi Volksen
- Sampath Purushothaman
- et al.
- 2012
- ECS J. Solid State Sci. Technol.
A Manufacturing grade, porous oxycarbosilane spin-on dielectric candidate with K 2.0
- Willi Volksen
- Teddie P. Magbitang
- et al.
- 2011
- JES
Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Geraud Dubois
- Willi Volksen
- et al.
- 2008
- Journal of Sol-Gel Science and Technology