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Dechao Guo- Darsen Lu
- Kangguo Cheng
- et al.
- 2014
- S3S 2014
- Terence B. Hook
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- 2014
- S3S 2014
- A. Khakifirooz
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- et al.
- 2013
- S3S 2013
- Phil Oldiges
- R. Muralidhar
- et al.
- 2011
- SISPAD 2011
- Biswanath (Biswa) Senapati
- Jeongho Do
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
- 2019
- IEEE Trans Semicond Manuf
- John H Zhang
- Haigou Huang
- et al.
- 2017
- MRS Advances
- Tao Chu
- Reinaldo A. Vega
- et al.
- 2015
- Journal of Applied Physics