Porosity in plasma enhanced chemical vapor deposited SiCoH dielectrics: A comparative study
- A. Grill
- V.V. Patel
- et al.
- 2003
- Journal of Applied Physics
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132 results for Ho-Cheol Kim
Templating of silsesquioxane cross-linking using unimolecular self-organizing polymers
- Eric F. Connor
- Linda K. Sundberg
- et al.
- 2003
- Angewandte Chemie - International Edition
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
On the replication of block copolymer templates by poly(dimethylsiloxane) elastomers
- Dong Ha Kim
- Zhiqun Lin
- et al.
- 2003
- Advanced Materials
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- B. Lahlouh
- T. Rajagopalan
- et al.
- 2003
- MRS Proceedings 2003
Versatile synthesis of nanometer sized hollow silica spheres
- Jeroen J. L. M. Cornelissen
- Eric F. Connor
- et al.
- 2003
- Chemical Communications
Neutron reflectivity on nanoporous poly(methylsilsesquioxane) thin films
- Ho-Cheol Kim
- Willi Volksen
- et al.
- 2003
- Chemistry of Materials
Fabrication of multilayered nanoporous poly(methyl silsesquioxane)
- Ho-Cheol Kim
- Jason B. Wilds
- et al.
- 2002
- Advanced Materials
Selective sorption of nanoporous poly(methyl silsesquioxane)
- Ho-Cheol Kim
- Jason B. Wilds
- et al.
- 2002
- Chemistry of Materials
Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering
- E. Huang
- M. Toney
- et al.
- 2002
- Applied Physics Letters