ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- P. Lazzeri
- G.W. Rubloff
- et al.
- 2004
- Surface and Interface Analysis
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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131 results for Ho-Cheol Kim
Optical waveguides with an aqueous core and a low-index nanoporous cladding
- W.P. Risk
- H.C. Kim
- et al.
- 2004
- Optics Express
Pore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir
Miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications: Comparison of modulated differential scanning calorimetry and fluorescence spectroscopy
- Q.R. Huang
- Ho-Cheol Kim
- et al.
- 2003
- Macromolecules
Porosity in plasma enhanced chemical vapor deposited SiCoH dielectrics: A comparative study
- A. Grill
- V.V. Patel
- et al.
- 2003
- Journal of Applied Physics
Templating of silsesquioxane cross-linking using unimolecular self-organizing polymers
- Eric F. Connor
- Linda K. Sundberg
- et al.
- 2003
- Angewandte Chemie - International Edition
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
Versatile synthesis of nanometer sized hollow silica spheres
- Jeroen J. L. M. Cornelissen
- Eric F. Connor
- et al.
- 2003
- Chemical Communications
Neutron reflectivity on nanoporous poly(methylsilsesquioxane) thin films
- Ho-Cheol Kim
- Willi Volksen
- et al.
- 2003
- Chemistry of Materials
Selective sorption of nanoporous poly(methyl silsesquioxane)
- Ho-Cheol Kim
- Jason B. Wilds
- et al.
- 2002
- Chemistry of Materials