Crystallinity and wet etch behavior of HfO2 films grown by MOCVD
- Katherine L. Saenger
- Cyril Cabral Jr.
- et al.
- 2003
- MRS Proceedings 2003
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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97 results for Katherine Saenger
Implications of gate design on RF performance of sub-100 nm strained-Si/SiGe nMODFETs
- Q. Ouyang
- S.J. Koester
- et al.
- 2003
- SISPAD 2003
A selective etching process for chemically inert high-k metal oxides
- Katherine L. Saenger
- Harald F. Okorn-Schmidt
- et al.
- 2002
- MRS Proceedings 2002
Sub-micron platinum electrodes by through-mask plating
- K.L. Saenger
- G. Costrini
- et al.
- 2000
- ECS Meeting 2000
Electrodes and barriers for dram and feram: Processing, integration, and fundamentals
- K.L. Saenger
- P.C. Andricacos
- et al.
- 2001
- MRS Online Proceedings Library
Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
Properties and decomposition behaviors of reactively sputtered Pt(O) electrode materials
- K.L. Saenger
- S.M. Rossnagel
- 1999
- MRS Proceedings 1999
Pulsed laser deposition of high-epsilon dielectrics: PMN and PMN-PT
- K.L. Saenger
- R.A. Roy
- et al.
- 1992
- MRS Proceedings 1992
Electromechanical conversion efficiency of PZT films
- K.F. Etzold
- R.A. Roy
- et al.
- 1990
- IUS 1990
COMPARATIVE MEASUREMENTS OF PLASMA O ATOM CONCENTRATION BY SIMULTANEOUS TWO-PHOTON LASER-INDUCED FLUORESCENCE AND OPTICAL EMISSION ACTINOMETRY.
- K.L. Saenger
- R.E. Walkup
- et al.
- 1983
- ECS Meeting 1983