Characterization of room temperature recrystallization kinetics in electroplated copper thin films with concurrent x-ray diffraction and electrical resistivity measurements
- Mikhail Treger
- Christian Witt
- et al.
- 2013
- Journal of Applied Physics
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66 results for I.C. Noyan
Evolution of strain energy during recrystallization of plated Cu films
- Conal E. Murray
- Robert Rosenberg
- et al.
- 2013
- Journal of Applied Physics
Probing strain at the nanoscale with X-ray diffraction in microelectronic materials induced by stressor elements
- Conal E. Murray
- S. Polvino
- et al.
- 2013
- Thin Solid Films
Nanoscale strain characterization in microelectronic materials using X-ray diffraction
- Conal E. Murray
- Andrew Ying
- et al.
- 2012
- Powder Diffraction
Nanoscale silicon-on-insulator deformation induced by stressed liner structures
- Conal E. Murray
- Andrew Ying
- et al.
- 2011
- Journal of Applied Physics
A quantitative analysis of room temperature recrystallization kinetics in electroplated copper films using high resolution x-ray diffraction
- Andrew Ying
- Christian Witt
- et al.
- 2011
- Journal of Applied Physics
Modeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam
- Andrew Ying
- Braxton Osting
- et al.
- 2010
- Journal of Applied Crystallography
A rigorous comparison of X-ray diffraction thickness measurement techniques using silicon-on-insulator thin films
- Andrew J. Ying
- Conal E. Murray
- et al.
- 2009
- Journal of Applied Crystallography
Strain measured in a silicon-on-insulator, complementary metal-oxide-semiconductor device channel induced by embedded silicon-carbon source/drain regions
- Conal E. Murray
- Z. Ren
- et al.
- 2009
- Applied Physics Letters
Local strain distributions in silicon-on-insulator/stressor-film composites
- Özgür Kalenci
- Conal E. Murray
- et al.
- 2008
- Journal of Applied Physics