Quantitative metrology study of Cu/SiO2 interconnect structures using fluorescence x-ray microscopy
- Guangyong Xu
- X. Su
- et al.
- 2001
- Applied Physics Letters
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66 results for I.C. Noyan
Quantitative nanoscale metrology study of Cu/SiO2 interconnect technology using transmission x-ray microscopy
- X. Su
- C.B. Stagarescu
- et al.
- 2000
- Applied Physics Letters
Divergence effects in monochromatic x-ray microdiffraction using tapered capillary optics
- I.C. Noyan
- P.-C. Wang
- et al.
- 2000
- Review of Scientific Instruments
Images of local tilted regions in strain-relaxed SiGe layers
- P.M. Mooney
- J.L. Jordan-Sweet
- et al.
- 1999
- Physica B: Condensed Matter
Mechanisms for microstructure evolution in electroplated copper thin films
- J.M.E. Harper
- C. Cabral Jr.
- et al.
- 1999
- MRS Spring Meeting 1999
Observation of local tilted regions in strain-relaxed SiGe/Si buffer layers using x-ray microdiffraction
- P.M. Mooney
- J.L. Jordan-Sweet
- et al.
- 1999
- Applied Physics Letters
A cost-effective method for minimizing the sphere-of-confusion error of x-ray microdiffractometers
- I.C. Noyan
- S. Kaldor
- et al.
- 1999
- Review of Scientific Instruments
A modified voigt method for calculation of the elastic constants of ensembles selected by diffraction methods
- Conal E. Murray
- I.C. Noyan
- 1999
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Mechanisms for microstructure evolution in electroplated copper thin films near room temperature
- J.M.E. Harper
- C. Cabral Jr.
- et al.
- 1999
- Journal of Applied Physics
Characterization of substrate/thin-film interfaces with x-ray microdiffraction
- I.C. Noyan
- J.L. Jordan-Sweet
- et al.
- 1998
- Applied Physics Letters