Corrosion of Si-O based porous low-k dielectrics
- A.B. Hall
- G.J. Irvine
- et al.
- 2012
- Applied Physics Letters
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72 results for Stephen M. Gates
Effects of chemical mechanical polishing on a porous SiCOH dielectric
- S. Gates
- S. Papa Rao
- et al.
- 2012
- Microelectronic Engineering
Adjusting the skeleton and pore structure of porous SiCOH dielectrics
- S. Gates
- G. Dubois
- et al.
- 2009
- JES
Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
- E. Todd Ryan
- Stephen M. Gates
- et al.
- 2008
- Journal of Applied Physics
Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
- A. Grill
- D. Edelstein
- et al.
- 2008
- Journal of Applied Physics
Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
- S. Gates
- D. Neumayer
- et al.
- 2007
- Journal of Applied Physics
Detection of open or closed porosity in low-κ dielectrics by solvent diffusion
- Marcus A. Worsley
- Mark Roberts
- et al.
- 2005
- Microelectronic Engineering
Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature
- Marcus A. Worsley
- Stacey F. Bent
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In Situ Determination of the Effects of CO2 and Other Volatile Impurities on YBa2Cu3O7_x
- C. Michael Greenlief
- Joseph F. Bringley
- et al.
- 2002
- Chemistry of Materials
Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry
- Joseph M. Jasinski
- Stephen M. Gates
- 2002
- Accounts of Chemical Research