Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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85 results for Nelson Felix

Design technology co-optimization assessment for directed self-Assembly-based lithography: Design for directed self-Assembly or directed self-Assembly for design
- - Kafai Lai
  - Chi Chun Liu
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Study of alternate hardmasks for extreme ultraviolet patterning
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2016
- JVSTB
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
- - Timothy A. Brunner
  - Vinayan C. Menon
  - et al.
- 2013
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Predicting substrate-induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS