Critical role of surface steps in the alloying of Ge on Si(001)
- J.B. Hannon
- M. Copel
- et al.
- 2004
- Physical Review Letters
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150 results for Matthew Copel
The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
- H. Kim
- C. Lavoie
- et al.
- 2004
- Journal of Applied Physics
High-mobility ultrathin semiconducting films prepared by spin coating
- David B. Mitzi
- Laura L. Kosbar
- et al.
- 2004
- Nature
Epitaxial silicon and germanium on buried insulator heterostructures and devices
- N.A. Bojarczuk
- M. Copel
- et al.
- 2003
- Applied Physics Letters
Decomposition of interfacial SiO2 during HfO2 deposition
- M. Copel
- M.C. Reuter
- 2003
- Applied Physics Letters
Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
- E. Gusev
- C. Cabral Jr.
- et al.
- 2003
- Microelectronic Engineering
Epitaxial Si films grown on lattice matched (LaxY 1-x)O3/Si (111) structures by molecular beam epitaxy
- V. Narayanan
- S. Guha
- et al.
- 2002
- MRS Proceedings 2002
Physical and electrical properties of reactive molecular-beam-deposited aluminum nitride in metal-oxide-silicon structures
- L.Å. Ragnarsson
- N.A. Bojarczuk
- et al.
- 2003
- Journal of Applied Physics
Selective desorption of interfacial SiO2
- M. Copel
- 2003
- Applied Physics Letters
High mobility p-channel germanium MOSFETS with a thin Ge oxynitride gate dielectric
- Huiling Shang
- Harald Okorn-Schmidt
- et al.
- 2002
- IEDM 2002