High performance 32nm SOI CMOS with high-k/metal gate and 0.149μm 2 SRAM and ultra low-k back end with eleven levels of copperB. GreeneQ. Lianget al.2009VLSI Technology 2009
Extending dual stress liner process to high performance 32nm node SOI CMOS manufacturingM. CaiB. Greeneet al.2008IEEE International SOI Conference 2008
SMT and enhanced SPT with Recessed SD to improve CMOS Device PerformanceS. FangS.S. Tanet al.2008ICSICT 2008
Recent progress and challenges in enabling embedded Si:C technologyB. YangZ. Renet al.2008ECS Meeting 2008
A simple hardware-based statistical model on 65nm SOI CMOS technologyQ. LiangJ.B. Johnsonet al.2007ISDRS 2007
RTA-driven intra-die variations in stage delay, and parametric sensitivities for 65nm technologyI. AhsanN. Zamdmeret al.2006VLSI Technology 2006