Ultrathin high-K metal oxides on silicon: Processing, characterization and integration issues
- E. Gusev
- E. Cartier
- et al.
- 2001
- Microelectronic Engineering
Publications
Date
Featured collections
Popular topics
182 results for Eduard Cartier
Electrical characterization of Al2O3 n-channel MOSFETs with aluminum gates
- L.Å. Ragnarsson
- S. Guha
- et al.
- 2001
- IEEE Electron Device Letters
Materials characterization of Zro2-SiO2 and HfO2-SiO2 binary oxides deposited by chemical solution deposition
- D. Neumayer
- E. Cartier
- 2001
- Journal of Applied Physics
High-quality aluminum oxide gate dielectrics by ultra-high-vacuum reactive atomic-beam deposition
- S. Guha
- E. Cartier
- et al.
- 2001
- Journal of Applied Physics
Molecular-beam-deposited yttrium-oxide dielectrics in aluminum-gated metal-oxide-semiconductor field-effect transistors: Effective electron mobility
- L.Å. Ragnarsson
- S. Guha
- et al.
- 2001
- Applied Physics Letters
Imaging of trapped charge in SiO2 and at the SiO2-Si interface
- R. Ludeke
- E. Cartier
- 2001
- Applied Physics Letters
Interface studies of tungsten gate metal-oxide-silicon capacitors
- Huiling Shang
- Marvin H. White
- et al.
- 2001
- Applied Physics Letters
Robustness of ultrathin aluminum oxide dielectrics on Si(001)
- M. Copel
- E. Cartier
- et al.
- 2001
- Applied Physics Letters
Formation of a stratified lanthanum silicate dielectric by reaction with Si(001)
- M. Copel
- E. Cartier
- et al.
- 2001
- Applied Physics Letters
Thermally stable ultra-thin Zr silicate for CMOS applications
- Z. Luo
- T.P. Ma
- et al.
- 2001
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings