Challenges of nickel silicidation in CMOS technologies
- Nicolas Breil
- Christian Lavoie
- et al.
- 2015
- Microelectronic Engineering
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33 results for Ahmet S. Ozcan
Compositional dependence of the optical conductivity of Ni1 - XPtx alloys (0 < x < 0.25) determined by spectroscopic ellipsometry
- Lina S. Abdallah
- Stefan Zollner
- et al.
- 2014
- Thin Solid Films
Optical conductivity of Ni1-xPtxSi monosilicides (0 < x < 0.3) from spectroscopic ellipsometry
- Lina S. Abdallah
- Stefan Zollner
- et al.
- 2014
- JVSTB
Optical conductivity of Ni1- XPtx alloys (0< x <0.25) from 0.76 to 6.6 eV
- Lina S. Abdallah
- Tarek M. Tawalbeh
- et al.
- 2014
- AIP Advances
Effects of temperature dependent pre-amorphization implantation on NiPt silicide formation and thermal stability on Si(100)
- Ahmet S. Ozcan
- Donald Wall
- et al.
- 2013
- Applied Physics Letters
Exploitation of a self-limiting process for reproducible formation of ultrathin Ni1-x Ptx silicide films
- Zhen Zhang
- Bin Yang
- et al.
- 2010
- Applied Physics Letters
Ni-Pt silicide formation through Ti mediating layers
- Paul Besser
- Christian Lavoie
- et al.
- 2007
- Microelectronic Engineering
Evaluation of thermal stability for CMOS gate metal materials
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2004
- JES
Evolution of microstructure in Ti-Ta bilayer thin films on polycrystalline-Si and Si(001)
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2004
- Thin Solid Films
Texture of tetragonal α-FeSi2 films on Si(001)
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Physical Review B - CMMP