An overview of 300mm SOI starting wafer quality and its yield detractors
- Pei Y. Tsai
- Marlene Almonte
- et al.
- 2005
- ISTFA 2005
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72 results for Harold J. Hovel
Development of stacking faults in strained silicon layers
- S.W. Bedell
- A. Reznicek
- et al.
- 2005
- IEEE International SOI Conference 2005
Characterization of ultra thin SOI and SSOI substrates: Defect and strain analysis
- S.W. Bedell
- H.J. Hovel
- et al.
- 2005
- ECS Meeting 2005
Strain engineering for silicon CMOS technology
- D.K. Sadana
- S.W. Bedell
- et al.
- 2005
- ECS Meeting 2005
300 mm SGOI/strain-Si for high-performance CMOS
- A. Reznicek
- S.W. Bedell
- et al.
- 2004
- IEEE International SOI Conference 2004
Strained-silicon / silicon-germanium-on-insulator for high-performance CMOS : A manufacturable process for 300 mm substrates
- A. Reznicek
- S.W. Bedell
- et al.
- 2004
- ECS Meeting 2004
0.22 μm CMOS-SOI technology with a Cu BEOL
- A. Ajmera
- J. Sleight
- et al.
- 1999
- VLSI Technology 1999
Device and circuit design issues in SOI technology
- G. Shahidi
- A. Ajmera
- et al.
- 1999
- CICC 1999
HgFET: A new characterization tool for SOI silicon film properties
- H.J. Hovel
- 1997
- IEEE International SOI Conference 1997
History dependence of non-fully depleted (NFD) digital SOI circuits
- F. Assaderaghi
- G. Shahidi
- et al.
- 1996
- VLSI Technology 1996