Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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62 results for S. Purushothaman

Use of difunctional silylation agents for enhanced repair of post plasma damaged porous low k dielectrics
- - S.V. Nitta
  - S. Purushothaman
  - et al.
- 2005
- AMC 2005
BEOL interconnects for 45 nm node and beyond
- - R.R. Yu
  - J. Doyle
  - et al.
- 2005
- VMIC 2005
Looking into the crystal ball: Future device learning using hybrid E-beam and optical lithography
- - S.E. Steen
  - S.J. McNab
  - et al.
- 2005
- Microlithography 2005
Analysis of an extreme low-κ organosilicate dielectric film exposed to representative plasmas and to a restorative process
- - M. Colburn
  - S.V. Nitta
  - et al.
- 2003
- AMC 2003
A high performance 0.13 μm copper BEOL technology with low-k dielectric
- - R.D. Goldblatt
  - B.N. Agarwala
  - et al.
- 2000
- IITC 2000
DUV stability of carbon films for attenuated phase shift mask applications
- - Alessandro Callegari
  - Katherina Babich
  - et al.
- 1998
- SPIE Advanced Lithography 1998
New high conductivity lead (Pb)-free conducting adhesives
- - S.K. Kang
  - T. Graham
  - et al.
- 1995
- IEEE International Symposium on Electronics and the Environment 1995
Thin film transfer process for low cost mcm-d fabrication
- - C. Narayan
  - S. Purushothaman
  - et al.
- 1994
- MCMC 1994
Thin film transfer process for low cost MCM's
- - C. Narayan
  - S. Purushothaman
- 1993
- IEMT 1993
Ta/polyimide adhesion durability
- - A.C. Callegari
  - B.K. Furman
  - et al.
- 1992
- ESSDERC 1992